M A I N T E NAN C E
OP MA6-8/BA6-8 E Rev05 07-06 Maintenance 51
2
2.6.6. Conclusion
Remarks for the Optics Cleaning
1 Use clean, dry nitrogen as a first step to remove
dust or particles.
2. Never wipe lenses with dry paper or tissue - this
may cause scratches.
3. Never use abbrasive materials, e.g. dry leather
wipers or dry cloths or polystyrene rods.
4. Always try Di-water for cleaning before using a
solvent.
5. Never use acetone to clean any optical surface.
It could be dissolved and destroyed. Never use
acids or ammoniac for cleaning. Use only above
recommended solvents.
6. Never use „Throw-away“ Q-tips because they
contain contaminations.
7. Never use metal swabs you could scratch the op-
tical surface.
8. Never try to disassemble combined optics and
the inner optics of the microscopes.
9. Never soak optical components in solvents for an
extended time.
2.7. Facts and Data for
Maintenance and Service
2.7.1. Consumables
• The UV-lamp must be replaced, when it reaches
the operation life time, as specified by the lamp
manufacturer. (see section Lamp Replacement
for details). Note that this time interval is speci
-
fied for both features:
• save lamp use with minimum risk of lamp ex-
plosion, and
• intensity degradation within specified limit
(mostly within 70% of original intensity). The
specified time applies only for continuous use
time with rare ignition events.
If burning times are short and the lamp is ignited
very often, the life time can be reduced to 50%. If
a lamp is used outside its specification for cooling
or the electric parameters, the time could be re
-
duced dramatically !
• The electric connection wire of the lamp (anode
wire) - and assembling materials like nuts - must
be replaced, as soon as the surface of the con
-
tact points degrades and is no more perfectly
conductive.
• The halogen microscope illumination lamp must
be replaced when it has burned out (many
1000h). Replace only by the identical type.
• Vacuum seals on chucks or mask holders are
sensitive and may be destroyed by fragments or
by inadequate use. They must be replaced im
-
mediately when leaking.
• Contamination and degradation of photo masks
depends highly on the exposure/contact modes
used in different applications.
Required cleaning or replacement intervalls must
be tested by the user. SUSS does not supply
photo masks.
• The elipsoid mirror has - because of its sensitive
coating - a limited life time; generally it must be
replaced after 2 to 5 years of use.
• For cleaning purposes solvents and tissues are
required as described in the appropriate sections
of the manuals.
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