SUSS MA6 - 2.4 Replacement of the Exposure Lamp 1000 W

M A I N T E NAN C E
OP MA6-8/BA6-8 E Rev05 07-06 Maintenance 43
2
2.4. Replacement of the Expo-
sure Lamp 1000 W
See also Chapter 1: Warnings and Safety , section
„Chemical Hazards“.
Danger!
UV lamps are pressurized and contain
mercury.
If handled careless the lamp may ex-
plode emitting shivers and spilling the
mercury.
Store lamps always in the original box.
Handle lamps only with protective gog-
gles or face shield and gloves.
Let the lamp cool down after use.
See the safety section of this manual
for a more detailed description of ade
-
quate lamp handling.
Do not touch the quartz bulb of the ex-
posure lamp or cold light mirror with
your fingers. Clean inadvertently
touched spots immediately with alco
-
hol and a soft lint-free cloth.
2.4.1. Replacement Procedure
• Switch off the mask aligner by main switch.
• If the exposure lamp power supply CIC is sepa-
rately supplied, switch it off, too.
• Do not open the lamp house until the lamp has
been switched off for at least 20 minutes.
• Unscrew the screws securing the door of the
lamp house and swing it open.
• Protect the cold light mirror with lint-free tissue.
• Disconnect the lead wire of the exposure lamp
(remove corresponding unit securing the positive
terminal of the lead wire) and remove.
• Loosen lever holding the upper socket of the ex-
posure lamp and remove lamp from the lamp
house.
Warning!
Handle the lamp only by its metal ends.
Do not mechanically stress the lamp
during installation, the glass bulb could
break or explode.
• Take the new lamp from its box and remove the
knurled nuts, which are no longer needed. If they
are used, they may intercept light from the ellip
-
soidal mirror, causing a loss of uniformity and
overheating of the lamp.
• Install the negative terminal (non-engraved end)
of the new lamp in the socket on top of the lamp
house (using the adapter if required), by grasping
the lamp at the positive terminal (engraved end)
of the lamp.
• Connect the lead wire (positive terminal) and
guarantee a well conducting electrical contact
without cracking the lamp or the feed through.
Never twist the body of the lamp or of the feed
through. Counterold directly besides the nut.Re
-
place parts with worn-out electric contacts.
• Close the lamp house and secure it with three
screws.
• Pack the used lamp carefully to the original box
for save storage or disposal.
2.4.2. Adjusting the Exposure
Lamp
All exposure lamp adjustments are done with the ex-
posure lamp power supply in idle mode.
In order to perform the adjustments, you will need an
intensity meter and the appropriate optical probes
for the wavelength 405 nm, 365 nm, 320 nm, 240
nm, or 220 nm.
WARNING!
The UV and IR radiation produced by
the exposure lamp can cause eye dam
-
age and skin burns.
Personnel entrusted with the adjust-
ment of the exposure lamp should wear
eye and skin protection against ultravi
-
olet radiation and should avoid exten-
sive exposure.
SUSS MicroTec will not be responsible
for injuries arising from incorrect or un
-
protected work with these systems.
• Switch ON the mask aligner main switch.
• Switch ON the nitrogen and compressed air
sources which provide cooling for the lamp
house. Check for correct settings of cooling
pressure at the bottom pressure meter if neces
-
sary. Adjust the corresponding regulator to the