SUSS MA6 - Safe Clean-Up after Use of Solvents; Removal and Re-Insertion of Specific Optical Components

MAINTENANCE
50
OP MA6-8/BA6-8 E Rev05 07-06 Maintenance
2
2.6.4. Safe Clean-up after Use of
Solvents
• Do not mix different liquids.
• Cap each bin (bottle, bowl, can) securely.
• Restore all unused inventory to its safe-keeping.
• Dispose each used cleaning liquid according to
company or local waste rules and regulations.
• Dispose soaked cloths accordingly.
2.6.5. Removal and Re-Insertion
of Specific Optical Compo
-
nents
2.6.5.1. Handling of the Coldlight
Mirror
In order to be able to clean the coldlight mirror prop-
erly, it must be removed from the lamp house.
Caution!
The coldlight mirror must be treated
with the utmost care!
The orientation (coated face) of the coldlight mirror
in the holder is critical if the mirror is marked at the
side rim by an arrow. The tip of the arrow must be
oriented to the lamp, because this is the coated face.
When installing the mirror, make sure that the coat
-
ed side is oriented toward the exposure lamp.
New mirrors without an arrow at the rim are coated
on both faces (in doubt, check for identical reflection
of both faces).
The brackets for holding the coldlight mirror should
be tightened not too tightly in order to enable a ther
-
mal expansion of the mirror during operation.
Warning!
Do not touch the UV-lamp or the N2-
cooling nozzle, when removing or in-
stalling the coldlight mirror. The lamp
could be destroyed or lamp cooling
could be affected.
For detailed advice see manual sec-
tions Lamp Exchange, Lamp Cooling
and N2-Control!
Danger!
Special care is required at the lamp
house 5000W, see resp. manual.
2.6.5.2. Handling of the Ellipsoid Mirror
For removal and installation of the ellipsoid mirror
the UV lamp must be detached.
Warning!
For safe lamp handling insstruction see
manual section lamp exchange, lamp
cooling and N
2
-Control!
Do not deadjust N
2
-cooling nozzle!
To move out the mirror suport frame (in
the 350W lamp house the mirror itself)
the retaining screws must be removed.
Treat the reflecting surface with utmost
care!
In reassembly watch for centering the
mirror.
2.6.5.3. Lamp House Adjustments
The replacement and installation of the exposure
lamp is described in the operator manual of the
mask aligner.
The setting of the lamp, lamp house and socket cool-
ing is also described in the operator manual of the
mask aligner. There you will also find a list of the
cooling data, related to the lamp type used.
2.6.5.4. Adjustment of the Optics
The description of the optical components and their
exact position are found in the operator manual of
the mask aligner.
The optical components are positioned in the beam
path so that the uniformity and intensity are optimally
set in the exposure plane. This adjustment is set in
the factory and should only be changed on site and
readjusted if necessary by a SUSS MircoTec service
technician.