M A I N T E NAN C E
OP MA6-8/BA6-8 E Rev05 07-06 Maintenance 49
2
Legend to the cleaning procedure diagram:
N2 - blow off dust (or droplets) with nitrogen
y/n - check, if surface is clean (y=yes/clean;
n=no/no success)
DI - rinse with DI-water or submerge to DI-
water (as appropriate for the component.
Soap - rinse or submerge with detergent (1%) in
DI-water.
IPA - rinse or submerge with isopropanol alcohol
PE - Petroleum ether (special light benzine)
For extremely obstinate contaminations petroleum
ether can be used in addition to IPA.
If a treatment step has been nearly successful, but
one cannot be satisfied completely by the result, re
-
peat this step, prior to trying the next treatment step
or solvent type.
When a cleaning procedure proved to be successful
at an individual machine or production line, use al
-
ways the same procedure and solvent when the op-
tics of the identical machine needs cleaning again.
N
2
DI
Soap
n
?
?
n
DI
?
IPA
DI
?
n
n
Coated
Optics
Proceed exremely gently
Wipe carefully with soaked clean tissue (see text)
use the liquid, which proved most effective before
PE
DI
?
n
DI
?
n
Exchange component or
call for SUSS Service
N
2
- Blow completely dry with clean Nitrogen
Reinstall the optical component
y
y
y
y
y
y
y
y
n
(attend location and orientation)
To Next Page
Loading...
