SUSS MA6 - 3.7 Service Information; Subassemblies: MA8; MA6; MA6;BA6; BA6; MA6;BA6-ISA; [M]otorized stage; NFH

Appendix
MA6 / MA8 - 3 Appendix - Rev.05 07-06
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3.7 Service Information
3.7.1 Subassemblies: MA8; MA6; MA6/BA6; BA6; MA6/BA6-ISA;
[M]otorized stage; NFH
The respective first number of the following subassemblies refers
to the above listed subassembly unit.
Subassembly - Item Subassembly - Prefix #
Alignment Stage 1
Front Panel 2
Keyboard / Handrest 3
Base Plate 4
Pneumatic 5
BSA Microscope 6
BSA Control Unit 7
TSA Microscope 8
Exposure Unit 9