SUSS MA6 - Select Mask Loading Type

Operation of the Machine
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
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1.5 Step by Step Machine Interactions
1.5.1 Select Mask Loading Type
For example: select manual mask loading (default)
Unload the mask before this selection is
initiated!
Display message Following operator action (keystroke)
"ready for Load" F1
"microscope up/down" x
"change align speed" x
"single step config" x
"centering stage" x
"select maskloading" ENTER
"manual" x
"slide" x
"manual" ENTER
"ready for load"