SUSS MA6 - Front Panel Controls

Operation of the Machine
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
9
1
1.2.2 Front Panel Controls
Front panel
Note
Controls of MA8 Front Panel are identical
except their position.
201 POWER SWITCH ELECTRONIC
1 Pressure
202 COMPRESSED AIR gauge
203 NITROGEN gauge
4Vacuum
204 VACUUM gauge
205 VACUUM CHAMBER gauge (with regulator)
206 VACUUM SEAL (with regulator)
207 WEC - PRESSURE gauge (with regulator)
208 LCD-display
209 CONTACT indicator
3 Illumination
210 ILLUMINATION switch
211 BSA/IR microscope illumination
212 TSA microscope illumination
213 MAGNIFICATION BSA switch
214 SPLITFIELD switch
2Substrate
215 TOP SUBSTRATE LEFT/RIGHT
216 BOTTOM SUBSTRATE LEFT/RIGHT
322 BSA MICROSCOPE key
323 LEFT key
324 BOTH key
325 RIGHT key
326 TOP/BOTTOM key