Operation of the Machine
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
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1
1.1 Definitions
1.1.1 How to Use this Manual
Start to reading this manual, some rules are applica-
ble. The name of a control function or control indica-
tor is written in capitals. For example:
EDIT PROGRAM
Refers to the key named edit program. Words shown
in the display are included in quotation marks. For ex
-
ample:
"move slide into machine and confirm
with ENTER"
A warning for the operator of the machine is written
cursive. For example:
Watch out for the microscope movement!
Every operator control function and display is referred
by a number. The first digit of this is equal to the figure
number showing it. For example:
204. VACUUM gauge
This means that the element labeled VACUUM is a
gauge explained as item 4 and is displayed in figure
2. This documentation is for using the machine as a
mask aligner. The term TOP SUBSTRATE (on which
is the upper focus plane) represents the upper sub
-
strate during bond alignment and a mask during li-
thography. The term BOTTOM SUBSTRATE (on
which is the lower focus plane) is replaced in the text
by the word wafer for bondalignment and lithogra
-
phy.
1.1.2 Key LED's
Each key of the keyboard except the ARROW keys is
equipped with a light emitting diode, indicating the
following:
–LED on:
key selected or function active
– LED off:
key not selected or function deactivated
– LED flashing:
most applicable key to continue
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