OPERATION OF THE MACHINE
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
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1.1.3 Coordinate Systems
The length units for the x and y-direction are in milli-
meter. The z-direction length unit is µm. They refer to
a coordinate system whose origin is in the center of
the alignment stage unit. The origin of the z-axis is
equal to the mask plane or upper substrate plane
(see Figure 1).
Alignment Stage with Coordinate System
101 MAIN POWER switch
102 EMERGENCY POWER OFF key
103 Knob STG-X-MOVEMENT
104 Knob STG-Y-MOVEMENT
105 Knob STG-Θ-MOVEMENT
1 Mask holder
2 Transport slide
3 Snap in connector mask vacuum
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