SUSS MA6 - Load Mask by Slide

OPERATION OF THE MACHINE
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
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1.5.8 Load Mask by Slide
For Example: load mask by transport slide with BSA
align
Unload the mask before this selection
is initiated!
Display message Following operator action (keystroke)
"ready for Load" F1
"microscope up/down" x
"Change align speed" x
"single step config" x
"centering stage" x
"select maskloading" ENTER
"manual" x
"slide" ENTER
"no align"
y
"TSA align"
y
"BSA align" ENTER
"ready for Load" CHANGE MASK
"Load maskholder" ENTER
"Load mask transfer plate and
mask"
ENTER
"Perform mask loading - please wait"