SUSS MA6 - Changing the TSA, BSA and Stage Alignment Speed

OPERATION OF THE MACHINE
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
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1.5.4 Changing the TSA, BSA and Stage Alignment Speed
(If necessary)
(to edit the fast speed activate the FAST key, LED on)
Display message Following operator action (keystroke)
"ready for Load" F1
"microscope up/down" x
"Change align speed" ENTER
"BSA Parameter
Slow Speed [%]: 39" x
(Edit value by Y and Y )
"STG Parameter
Slow Speed [%]: 39" x
(Edit value by Y and Y )
"TSA Parameter
Slow Speed [%]: 39" x
(Edit value by Y and Y )
"BSA Parameter
Slow Speed [%]: 39" ENTER
"ready for Load"