SUSS MA6 - 1.2 Controls and Indicators; Alignment Stage Controls

OPERATION OF THE MACHINE
MA6 / MA8 - 1. Operation of the Machine - Rev.05 07-06
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1.2 Controls and Indicators
101 MAIN POWER switch
This connects the machine to the public power sta-
tion for electricity.
102 EMERGENCY POWER OFF key
In any case of danger press this button to disconnect
the machine from the public power line.
1.2.1 Alignment Stage Controls
103 Knob STG-X-MOVEMENT
This is located at the right side of the alignment stage
and moves the wafer in x-direction. Maximal travel
±10mm.
104 Knob STG-Y-MOVEMENT
This is located at the left side of the alignment stage
and moves the wafer in y-direction. Maximal travel
±5mm.
105 Knob STG-Θ-MOVEMENT
This is the small knob at the right side of the align-
ment stage. Maximal travel ±5°.