MAINTENANCE
44
OP MA6-8/BA6-8 E Rev05 07-06 Maintenance
2
proper setting.( see section Utilites and Lamp
Cooling).
• Switch ON the exposure lamp power supply CIC
and check that the correct lamp type is selected.
If not, change to correct type.
• Reset the lamp life time counter for the new lamp
(see CIC manual for details).
• Press CP at the CIC.
• Ignite the exposure lamp by pressing the START
button. Allow the lamp to stabilize for at least 15
minutes.
• Start the mask aligner.
• Complete the LOGIN procedure.
• Load the LIGHT MEASURE program (button
LAMPTEST).
• Place a measuring plate instead of the exposure
chuck to avoid scratching of the surface. Place
the optical probe on the plate.
The three lamp adjustment knobs X, Y, and Z on the
lamp house are used to adjust the position of the ex
-
posure lamp in the ellipsoidal mirror. Their main pur-
pose is to achieve an uniform light distribution over
the given exposure area
2.4.2.1. Adjustment Procedure
• Maximize the respective readings on the power
meter by first shifting the lamp in the Z-direction
and then in the X- and Y-direction.
• Placing the probe alternately at the right and left
hand edges of the illuminated area, use the X-
knob to shift the lamp into the corresponding di
-
rection until the meter gives the same reading at
both locations.
• Placing the probe alternately at the front and rear
edges of the illuminated area, use the Y-knob to
shift the lamp into the corresponding direction un
-
til the meter gives the same reading at both loca-
tions.
• Recheck the position of the vertical adjustment
knob (Z-knob).
NOTE:
The Z-knob must only be used to maximize the in-
tensity of the exposure lamp. If you wish to adjust the
intensity for process purposes, either adjust the
power supply output or use proper filters. Using the
Z-knob to decrease the intensity will result in a build-
up of excess heat in the lamp house which could
lead to lamp explosion. In order to achieve the best
position for an even distribution of light, the Z-knob
must not be readjusted from its maximum intensity
position more than one half turn.
Z-knob: shifts the lamp vertically
and thus primarily controls
the light intensity.
Y-knob:shifts the lamp in the Y-
direction.
X-knob: shifts the lamp in the X-
direction.
Y Z X
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