SUSS MA6 - Motors (DCM)

Appendix
MA6 / MA8 - 3 Appendix - Rev.05 07-06
3
88
Motors (DCM)
S 1.15 Chuck movement in Y ±3 mm
[M]: Chuck Y reference (middle) pos.
S 1.16 Chuck identification (for ISA only)
[M]: Chuck rotation right endpos.
S 1.17 [M]: Chuck rotation reference (middle) pos.
S 1.18 [M]: Chuck rotation left endpos.
S 1.19 Knife exists and connected (Embossing-Option)
S 1.20 Separation Knife reference Y-direction (Embossing-Option)
S 1.21 Separation Knife reference Z-direction (Embossing-Option)
S 6.1 BSA-microscope x-end limit left and reference sensor
S 6.2 BSA-microscope y-end limit left and reference sensor
S 6.3 BSA-microscope x-end limit right and reference sensor
S 6.4 BSA-microscope y-end limit right and reference sensor
S 8.1 TSA-microscope z-down
S 8.2 TSA-microscope z-up
S 8.3 TSA-microscope x-endlimit
S 8.4 TSA-microscope x-centre
S 8.5 TSA-microscope y-endlimit
S 8.6 TSA-microscope y-centre
S 8.7 TSA-microscope Theta left (motorized TSA only)
S 8.8 TSA-microscope Theta right (motorized TSA only)
S 9.1 Mirror house forward
S 9.2 Mirror house backward
S 9.3 Exposure system forward
S 9.4 Exposure system backward
S 9.5 Lamp house position left/right (MA8 only) (sensor ON = LH at right side)
S10.1 NFH in expose position
S10.2 NFH in parking position
# Function
DCM 1.1 Z-axis
DCM 6.1 BSA-microscope x-left
DCM 6.2 BSA-microscope y-left
DCM 6.3 BSA-microscope x-right
DCM 6.4 BSA-microscope y-right
DCM 8.1 TSA-Microscope X
# Function