SUSS MA6 - Pressure Regulators (PR); Gauges (PD); Vacuum;Pressure Sensors (CV)

Appendix
MA6 / MA8 - 3 Appendix - Rev.05 07-06
89
3
Pressure Regulators (PR)
Gauges (PD)
Vacuum/Pressure Sensors (CV)
(CV - MUPS-1K PN: 151203)
DCM 8.2 TSA-Microscope Y
DCM Y Separation motor Y-direction (Embossing-Option)
DCM Z Separation motor Z-direction (Embossing-Option)
# Function
PR 1.13 Wafer loading pins
(PN 151085)
PR 1.9 Inflatable rubber seal
PR 5.1 Main air pressure
(PN 150917)
PR 5.2 Main nitrogen pressure
(PN 150917)
PR 5.3 Wedge error compensation (WEC) head pressure
PR 5.11 Adjustable WEC-pressure
(PN 151519)
PR 5.30 N
2
-Purge for substrate separation
# Function
PD 1.8 Vacuum chamber
PD 1.9 Inflatable rubber seal
PD 5.1 Main air pressure
PD 5.2 Main nitrogen pressure
PD 5.3 Wedge error compensation (WEC) head pressure
PD 5.4 Main vacuum
# Medium Function
CV 1.1 V Wafer vacuum (sensor ON = vac. O.K.)
CV 1.2 V Mask vacuum (sensor ON = vac. O.K.)
CV 1.3 V Vacuum fixture upper substrate (sensor ON = vac. O.K.)
CV 5.1 P Machine main air pressure (at Input pcb LED OFF = Pressure O.K.)
CV 5.2 N
2
Machine main nitrogen pressure (at Input pcb LED OFF = Pressure O.K.)
CV 9.7 N
2
Nitrogen cooling flow to lamp socket (sensor ON = cooling O.K.)
# Function