SUSS MA6 - Flow Meter (F); Potentiomater (PT); Switches (SW); PC Board Designation

Appendix
MA6 / MA8 - 3 Appendix - Rev.05 07-06
3
90
Flow Meter (F)
Potentiomater (PT)
Switches (SW)
PC Board Designation
# Function
F 9.7 Lower Lamp socket cooling
# Function
PT 2.1 Upper Substrate LEFT
PT 2.2 Upper Substrate RIGHT
PT 2.3 Lower Substrate LEFT
PT 2.4 Lower Substrate RIGHT
PT 2.5 Illumination LEFT
PT 2.6 Illumination RIGHT
PT 2.7 Illumination microscope
# Function
SW 2.1 Main switch
SW 2.2 Emergency switch
SW 2.3 Split field-switch
SW 2.4 BSA / IR-illumination
BOARD MANUAL ALIGNMENT STAGE MOTORIZED ALIGNMENT STAGE
C1 Controller (CPU) Controller (CPU)
C2 / C3 Input Input
C4 / C5 Output / Valve Driver Output / Valve Driver
C6 DC Motor Control (Z-axis) DC Motor Control (Z-axis and TSA)
C7 DC Motor Control (TSA Scope Stage X/Y) X,Y- Alignmnet Stage (Y,Z-Separation)
C8 DC Motor Control (BSA left X/Y) DC Motor Control (BSA left/right X/Y)
C9 DC Motor Control (BSA right X/Y) Joysticks RS232 extern
C10 Input optional MA8 ; MA6 with mot. TSA rotation
C11 Exposure Light Integrator or Focus Control
EISS
Light Integrator or Focus Control EISS