SUSS MA6 - Sensors (S)

Appendix
MA6 / MA8 - 3 Appendix - Rev.05 07-06
87
3
Sensors (S)
T 1.32 Controls vacuum for chamber purge negative resist
TO 8.1 Controls speed of microscope motion down
TO 8.2 Controls speed of microscope motion up
TO 8.3 Controls speed of microscope clamping
T 9.1 Controls speed of exposure shutter 1 close
TO 9.1 Controls speed of exposure shutter 1 open
T 9.2 Controls speed of exposure shutter 2 open
TO 9.2 Controls speed of exposure shutter 2 close
TO 9.4 Controls speed of mirror house motion backward
TO 9.5 Controls speed of mirror house motion forward
T 9.6 Controls nitrogen flow for shutter cooling
T 9.8 Controls nitrogen flow for cold light mirror (1000 W)
T 9.8.1 Controls nitrogen flow for upper lamp socket (1000W)
T 9.9 Controls flow for heat sink
OV 8.2 Reduces pressure variation for microscope
OV 1.13 For N
2
-Purge in chuck option
# Function
S 1.1 Chuck middle position left [M]: Chuck X left end-pos.
S 1.2 Chuck middle position right [M]: Chuck X right endpos.
S1.3 Transport slide front
S1.4 Transport slide back
S 1.5 Maskholder is present, Maskholderdefinition contact
S 1.6 LED OFF: Maskholder definition proximity
S 1.7 Adapter plate fixture
S 1.8 Adaption maskholder
S 1.9 Z-axis down (home position)
S 1.10 Z-axis up (wedge error compensation)
S 1.11 Chuck rotation
S 1.12 Chuck movement in X ±3 mm
[M]: Chuck X reference middle pos.
S 1.13 Chuck middle position front
[M]: Chuck Y front endpos.
S 1.14 Chuck middle position rear
[M]: Chuck Y rear endpos.
# Function