SPECIALS
Specials MJB4 Rev06 10-09 39
4
4. SPECIALS
4.1. Nano Imprint Lithography - NIL
The imprint process is a special application for the
MJB4 and therefore needs a modified operation
sequence which is described below:
Screen Page: Start
• The start screen appears after switch-ON and
initialisation of the machine
• The button Main menu leads to the main
screen page of the user interface.
Screen Page: Main menu
• The button Parameters opens the parameter
screen.
Screen Page: Parameters
• Within the Parameters Screen the Imprint pro-
cess can be selected within the program button.
It gives access to the selection of either Align
-
ment+Expos., Flood exposure or Imprint.
• After pushing the Imprint program it is dis-
played on the button.
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