INSTALLATION AND TRANSPORT
12 MJB4 - Installation and Transport Rev07 05-10
2
2.2.5. Transportation Locks
The following transportation locks must be removed
before commissioning the machine.
Alignment Stage
• Unscrew and remove screws 1 (2x) and remove
plastic plate.
• Unscrew and remove screws 2 (two of them were
hidden from the plastic plate) (3x)
• Unscrew and remove screws 3 (2x)
• Open the mask holder clamping and remove the
transport lock.
Alignment Stage
1 Screw 1 (2x)
2 Screw 2 (3x)
3 Screw 3 (2x)
4 Plastic plate
5 Transport lock (marked red)
TSA Microscope Manipulator
• Remove screws 1 and 2.
• Screw 1 secures the microscope stroke, and
screw 2 secures the X-Y adjustment on the ma
-
nipulator.
TSA Microscope Manipulator
1 Screw 1
2 Screw 2
4
1
3
2
5
2
1
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