SUSS MJB4 - Loading, Aligning and Exposing the Substrate

OPERATION OF THE MJB4
38 MJB4 - Operation Rev07 05-10
3
3.8.3. Loading, Aligning and Exposing the Substrate
Menu in the Display Button Strokes in the Display
MAIN MENU LOAD SUBSTRATE
LOAD SUBSTRATE
Load the mask holder with the mask
Pull out the slide and load the chuck
Place the substrate on the chuck
Insert the slide completely
Raise the substrate with the contact lever (WEC)
WARNING! Microscope pivots downwards
EXPOSE
Separation lever set to alignment position
SUBSTRATE ALIGNMENT
Align substrate
Separation lever set to alignment position for
exposure
EXPOSE ALIGNMENT CHECL
For checking the adjustment in the selected
exposure program
EXPOSURE
For exposing the substrate
WARNING! Microscope pivots upwards
Mirror housing and microscope move towards the
operator.
UNLOAD SUBSTRATE
Pull the contact lever back, pull out the transport
slide and load the substrate
MAIN MENU