INSTALLATION AND TRANSPORT
MJB4 - Installation and Transport Rev07 05-10 7
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2. INSTALLATION AND TRANSPORT
Containers must be opened and the machine must
be transported and installed by a SUSS MicroTec
service technician or person authorized by SUSS
MicroTec.
Users who open containers with system compo-
nents or install or transport the machine without a
SUSS MicroTec technician or a person authorized
by SUSS MicroTec do so at their own risk.
Power connections and supply connections (com-
pressed air, nitrogen, etc.) at the installation site
must be completely installed by the customer before
installation so the machine can be connected.
2.1. Prerequisites for Installa-
tion
The following installation prerequisites must be met
before the machine can be operated optimally:
2.1.1. Ambient Requirements
• The machine must be installed on a vibration-free
surface since vibrations can negatively influence
the machine’s function.
--> We recommend setting up the machine on a
SUSS MicroTec vibration-insulated base
frame intended for this purpose.
• The machine must be installed in a clean room.
Impurities in the air have negative effect on the
machine’s function.
--> We recommend clean room class 1000 or
better.
• The room temperature and relative humidity
should be controlled at the setup site.
--> We recommend a room temperature
between 20°C (68°F) and 22°C (72°F) and a
relative humidity between 45 and 55% (not
condensing).
• When planning the working area for the operator,
allow sufficient dorsal space. The microscope
moves forward for the exposure, therefore the
operator must have adequate space to back off
from the machine.
• The back of the machine must be at least 10 cm
(4 in) away from the room wall. See the figure
“Di-
mensions of the MJB4 Mask Aligner:” for the ex-
act dimensions of the aligner.
--> We recommend a distance of 30cm (12in).
Dimensions of the MJB4 Mask Aligner:
Width: 603 mm
Depth: 760 mm
Height: 658 mm
1400 mm (with base)
Weight: approx. 150 kg MJB4
160 kg base
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