OPERATION OF THE MJB4
20 MJB4 - Operation Rev07 05-10
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3.2.6. Lamp House
If the uniformity of the exposure lamp varies by more
than ±5%, it should be readjusted within the lamp
house and optics.
When an exposure lamp is replaced (see section
1.6.1.2. "Changing the Lamp"), the uniformity should
be checked first and then readjusted if necessary.
To do so, use the three setting knobs at the front of
the lamp house.
• Left setting knob for Y-direction
• Middle setting knob for Z-direction
• Right setting knob for X-direction
Setting Instructions:
The lamp must be on for about 20 minutes before it
reaches operating temperature. The Lamp test
function can be selected in the main menu. Using
the SUSS UV1000 intensity meter with the
appropriate probe, you check and set the intensity
and uniformity of the light.
Setting procedure: Place the probe in the center of
the light. The middle setting knob for the Z-direction
should be set so that the measuring device displays
the highest value. Do the same for the X- and Y-
directions.
Next, the light uniformity over the entire exposed
surface must be tested and, if necessary, slightly
corrected using the X, Y and Z setting knobs.
Attention!
UV light can seriously damage your
eyes.
Never remove the covers on the beam
path when the UV lamp is on!
Always wear UV protection goggles
and skin protection as well during lamp
adjustment.
UV protection goggles must be worn
even when measuring light on the
exposure chuck.
3.2.7. Basic Pneumatic Settings
Basic pneumatic settings
1 Nitrogen purge mask holder controller
2 Reduced vacuum chamber controller
3 WEC pressure controller
4 WEC pressure gauge
5 Vacuum chamber gauge
6 Vacuum gauge
7 Nitrogen gauge
8 CDA gauge
9 Lamp cooling gauge
Compressed Air
The device works reliably at an operating pressure
of >5.5 bar. The pressure must be set correctly on
the pressure reducing valve by a service engineer
and then read from the manometer.
Nitrogen
A nitrogen pressure rated at 1.5 bar must be set on
the pressure reducing valve by a service engineer
and then read from the manometer.
Nitrogen is used to cool the exposure lamp, to build
up additional pressure under the substrate (hard
contact exposure), as a cover gas for the substrate,
and to ventilate the vacuum chamber after vacuum
exposure.
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