OPERATION OF THE MJB4
MJB4 - Operation Rev07 05-10 21
3
Vacuum
The vacuum supplied to the machine should be
-0.8 bar. The vacuum level can be read on the
corresponding manometer.
All main pressures are monitored by detectors which
display an error message on the touch screen if
there is a deviation of approx. -20%.
Low Vacuum (with controller)
This controller sets the low pressure within the
vacuum chamber between the substrate and mask.
The vacuum is regulated by injecting additional
nitrogen into the vacuum line.
WEC Pressure (with controller)
For wedge error compensation, the substrate must
be pushed against the mask with a defined amount
of force. The WEC pressure is used to compensate
for the greater weight of a large chuck. The WEC
pressure must also be proportionally adjusted to the
substrate surface. The pressure for wedge error
compensation can be set to meet specific processor
requirements (value between 0.2 and max. 2.0
[bar]). This can be done using the WEC PRESSURE
setting knob.
N
2
Purge Mask Holder (with controller)
The alignment station is equipped with nitrogen
purge to reduce the oxygen content between mask
and substrate when negative resist is used. The
nitrogen is injected from the back of the mask holder
frame between the mask and substrate. The volume
of nitrogen can be set using the PURGE MASK
HOLDER throttle.
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