OPERATION OF THE MJB4
MJB4 - Operation Rev07 05-10 33
3
3.6.2. Transmitted Light
3.6.2.1. Setting the Exposure Values
See section 3.4.3. "Setting the Parameters".
3.6.2.2. Loading the Mask
See section 3.4.5. "Loading the Mask".
Attention!
In order for all the processes to start,
the MAIN MENU must be selected and
the contact lever must be pressed!
3.6.2.3. Adjusting the Microscope with
IR Illumination
Setting the TSA Microscope
The splitfield switch must be set to the middle
position for the M604 microscope and the lever for
the IR camera opening must be in the IR position.
Focusing the Mask Level
Coarse focusing is possible using the TSA Z-motion
located behind the TSA microscope.
Set the fine focusing on the M604 microscope
separately. To do so, use the OBJECTIVE FOCUS
FINE MANUAL knob on the microscope.
Setting the TSA Microscope to the Mask Adjust-
ing Crosses
The right/left microscope is set to the right/left mask
adjusting crosses using OBJECTIVE X-
SEPARATION.
Unloading the Mask
To release the mask holder, remove both screws on
the right side of the mask holder frame. Take out the
mask holder and place it on a tray upside down.
Switch off the mask vacuum by pressing the button
“Mask vacuum is on“.
The mask can now be removed.
IR Illumination Setting
The Parameters menu must be selected on the
touch screen and the illumination must be set to
Infrared transm.light. The IR illumination arms can
now set precisely under the lenses.
Set the brightness using the left/right potentiometers
on the left front plate.
The left and right aperture diaphragms on the
microscope allow you to set the illumination on the
left and right separately.
Loading and Clamping the Mask Holder
With the top side facing up, the mask holder is
pushed into the adjusting station and then fasten in
the mask holder frame using the knurled screws.
3.6.2.4. Loading the Substrate
See section 3.4.6. "Loading the Substrate".
Caution!
The microscope pivots downward!
Setting the Separation lever to the Alignment
Position
Attention!
Never adjust the substrate if the mask
and substrate are in contact! Doing so
will damage the mask and substrate.
3.6.2.5. Aligning the Substrate
Focusing the Substrate Level
For fine lens alignment, use the OBJECTIVE
FOCUS FINE MANUAL knob on the microscope.
Alignment (screen page: Alignment)
The X, Y and Theta micrometer screws on the
alignment table are used for alignment. Align the
substrate alignment crosses so that they are central-
symmetrical to the mask alignment crosses.
Attention!
Never align the substrate if the mask
and substrate are in contact! Doing so
will damage the mask and substrate.
Checking the Alignment
See section 3.5.5. "Aligning the Substrate".
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