OPERATION OF THE MJB4
32 MJB4 - Operation Rev07 05-10
3
Setting the Separation Lever to the Alignment
Position
Attention!
Never align the substrate if the mask
and substrate are in contact! Doing so
will damage the mask and substrate.
3.6.1.4. Adjusting the Microscope
Setting the TSA Microscope
The splitfield switch must be set to the middle
position for the M604 microscope and the lever for
the IR camera opening must be in the IR position.
The left/right camera frame or the splitfield can be
set in the Parameters menu.
Microscope Illumination
Connect the microscope fiber optics to the IR light
source (illumination 3+4) and switch the illumination
to Infrared transm. light in the Parameters page.
Set the brightness using the left/right potentiometers
on the left front plate.
Make separate illumination settings for right/left
using the right/left aperture diaphragms on the
microscope.
Focusing the Mask Level
Coarse focusing is possible using the TSA Z-motion
located behind the TSA microscope.
Fine focusing is separately set on the M604
microscope. To do so, use the OBJECTIVE FOCUS
FINE MANUAL knob on the microscope.
Setting the TSA Microscope to the Mask Align-
ment Crosses.
The right/left microscope is set to the right/left mask
adjusting crosses with OBJECTIVE X-
SEPARATION.
3.6.1.5. Aligning the Substrate
Focusing the Substrate Level
For fine lens adjustment, use the OBJECTIVE
FOCUS FINE MANUAL knob on the microscope.
Adjustment (menu in the SUBSTRATE ADJUST-
MENT display)
Use the X, Y and Theta micrometer screws on the
alignment table for this. Align the substrate
alignment crosses so that they are central-
symmetrical to the mask alignment crosses.
Attention!
Never adjust the substrate if the mask
and substrate are in contact! Doing so
will damage mask and substrate!
Checking the Alignment
See section 3.5.5. "Aligning the Substrate".
3.6.1.6. Exposure
Once the substrate is aligned and brought to the
exposure position using the SEPARATION LEVER,
press the Exposure button to perform the exposure.
You must press Yes again on the display to confirm
the exposure.
If you press No or use the CONTACT or
SEPARATION LEVER, the shutter keeps closed.
The substrate can now be unloaded or readjusted.
After pressing Yes the shutter will be opened for the
programmed exposure time.
Caution!
Microscope in motion!
3.6.1.7. Unloading the Mask
To release the mask holder, remove both screws on
the right side of the mask holder frame. Take out the
mask holder and place it on a tray upside down.
Switch off the mask vacuum by pressing the Mask
vacuum is on button.
The mask can now be removed.
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