C O N T E N T S
MJB4 - Contents Rev07 05-10 ORIGINAL DOCUMENTATION I
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CONTENTS
PREFACE ...................................................................................................................a
1. WARNINGS and SAFETY PRECAUTIONS .........................................................1
1.1. Guidelines on Safety at Work .........................................................................1
1.2. Definition of Danger Advice and Warnings .....................................................1
1.3. Intended Use of this Machine .........................................................................1
1.4. Main Switch with Emergency Off Function .....................................................1
1.5. Dangers ..........................................................................................................2
1.5.1. Physical Dangers ..................................................................................2
1.5.2. Thermal Dangers ..................................................................................2
1.5.3. Electrical Dangers .................................................................................2
1.5.4. Radiation Danger ..................................................................................3
1.5.5. Danger of Poisoning ..............................................................................3
1.6. Working with the MJB4 Mask Aligner .............................................................3
1.6.1. Fitting, Changing and Cooling the Exposure Lamp ...............................4
1.6.2. Preparing the Machine for Working .......................................................5
1.6.3. Safety Checks .......................................................................................6
2. INSTALLATION and TRANSPORT ......................................................................7
2.1. Prerequisites for Installation ............................................................................7
2.1.1. Ambient Requirements ..........................................................................7
2.2. Transporting the Mask Aligner ......................................................................10
2.2.1. Warranty and Restrictions ...................................................................10
2.2.2. Receiving and Unloading the Machine ................................................10
2.2.3. Opening the Shipping Containers .......................................................10
2.2.4. Transport without a Pallet ...................................................................10
2.2.5. Transportation Locks ...........................................................................12
2.2.6. Taking the Machine out of Service ......................................................13
3. OPERATION OF THE MJB4 ...............................................................................15
3.1. Definitions .....................................................................................................16
3.1.1. Coordinate System ..............................................................................16
3.2. Controls and Displays ...................................................................................16
3.2.1. Alignment Stage ..................................................................................16
3.2.2. Display/Touch Screen .........................................................................17
3.2.3. Topside (TSA) Microscope Manipulator ..............................................18
3.2.4. TSA Microscope ..................................................................................18
3.2.5. Microscope Illumination .......................................................................19
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