WARNINGS AND SAFETY PRECAUTIONS
4 MJB4 - Warnings and Safety Rev07 05-10
1
1.5.5.2. Generation of Ozone during the
Operation of the Lamp
Short-wavelength ultraviolet light can ionize the at-
mospheric oxygen.
An exposure lamp therefore generates ozone during
operation.
Long-term and intensive exposure to ozone can lead
to damage to the respiratory organs.
Warning!
Where powerful lamps or special lamps
for deep-UV are used, additional ex
-
traction and controlled cooling by
means of nitrogen flushing should be
ensured (see setting tables)!
If the stipulated settings are applied correctly, the
ozone concentration in the area surrounding the
lamp house should remain well below the permissi
-
ble limit.
1.6. Working with the MJB4
Mask Aligner
Only SUSS MicroTec employees or qualified and
trained staff may service the machine.
Danger!
The operating and starting voltages in
high-pressure lamps are deadly dan
-
gerous!
The machine must be switched off be-
fore beginning servicing work on the
lamp house or other electrical compo
-
nents!
1.6.1. Fitting, Changing and Cool-
ing the Exposure Lamp
When working with high-pressure lamps, the appro-
priate safety regulations and service life specifica-
tions of the lamp manufacturer must be observed.
Hg-filled UV high-pressure lamps must be changed
once the service life specified by the manufacturer
has expired. There is an increased risk of lamp ex
-
plosion after this date!
Premature failure of a lamp can be the result of in-
correct lamp cooling (too powerful or too weak), in-
correct power setting, soiling of the lamp tube or
similar.
Exposure lamps should only be handled with gloves.
Clean any grease marks with alcohol!
1.6.1.1. Danger of Lamp Explosion
If the Hg high-pressure lamps are operated accord-
ing to their specification (type selection on CIC, cool-
ing, min/max power, service life), lamp explosions
during operation are extremely rare.
The exposure lamp should always be protected
against shock when handling - the lamps should al
-
ways be stored and transported in their original
packaging!
Any other mechanical stress such as bending or
twisting during installation should also be carefully
avoided!
Warning!
The exposure lamp is under high pres-
sure.
Mechanical face and eye protection
should be worn when handling a high-
pressure lamp!
If the lamp breaks, do not touch the
components with the hand and do not
inhale the Hg fumes!
Use a breathing mask with gas absorp-
tion during decontamination!
In the event of a lamp explosion, after the immediate
measures described in section Danger of poisoning
an Hg decontamination kit (e.g Mercurisorb) should
be used to eliminate the mercury which is still
present. Such a kit should always be kept in store.
These can be obtained, for example, from:
Carl Roth GmbH & Co
P.O. Box 100121
D-76231 Karlsruhe
http://www.carl-roth.de
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