OPERATION OF THE MJB4
MJB4 - Operation Rev07 05-10 25
3
3.4. Operating Sequences
3.4.1. Switching the Machine On/
Off
3.4.1.1. Preparation for Switching the
Machine ON
The following procedure assumes that the mask
aligner is properly installed and the equipment is
connected to the power supply as soon as the main
switch is turned on.
The machine should have the following pressure
values:
• Compressed air: 5.5 bar
• Nitrogen: 1.5 bar
• Vacuum: -0.8 bar (0.2 bar absolute)
3.4.1.2. Switching On the Machine
Turn the main switch with emergency off function
(front plate, left) to ON and wait until „Start machine
with ON/OFF button“ is displayed then press the
Electronics ON/OFF button (front plate).
Then the start page appears and after pushing the
button Main menu the main menu is displayed.
The exposure lamp is switched on automatically if a
CPC200/CPC350 power supply is used.
The CICI200 power supply is in stand-by mode after
the machine is switched on. The lamp must be
switched on separately at the CIC1200.
If the CIC1200 must be recalibrated after replacing
the lamp, proceed as described in
section 3.4.2.
"Switching On and Calibrating the Exposure Lamp".
3.4.1.3. Switching Off the Machine
The machine is switched off using the Electronics
ON/OFF button.
Press ON/OFF button longer than 2 sec to switch off
the lamp and the electronics.
The lamp power supply is switched off immediately
and the MJB4 electronics switches off automatically
after the cool down phase is complete (10 minutes).
IMPORTANT NOTE:
• To switch on the mask aligner, select the start
page and press the Electronics ON/OFF but
-
ton on the left side of the front plate.
Using the CPC200/CPC350 power supply the
exposure lamp is also switched on.
Using the CIC 1200 the lamp must be
switched on separately using the CIC 1200
key pad.
Attention!
Unload the mask before switching off
the machine!
Caution!
The microscope pivots upwards!
Only coarse focus the TSA microscope
when it is pivoted down or else the lens
-
es may be set too low and collide with
the mask or the mask holder.
In case of danger, turn the main switch
to OFF!
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