OPERATION OF THE MJB4
MJB4 - Operation Rev07 05-10 35
3
mask and substrate. Following exposure, the mini
chamber is flushed with nitrogen. Larger substrates
increase the time required for extraction and
ventilation. For the best results, it is recommended
to start a test series with long times and then
gradually reduce these times.
All parameters can be set in the Parameters menu.
To test the set values and the alignment, use the
Alignment check button before exposure.
3.7.5. Low Vacuum Contact
Exposure
This exposure type is identical to the vacuum
contact exposure with one exception: The vacuum
inside the vacuum chamber can be adjusted with the
controller LOW VACUUM. The setting can be read
at the display.
This allows high structure resolution of the vacuum
contact exposure to be combined with the least
possible mechanical stress from the substrate and
mask. To test the set values and the adjustment, use
the Alignment Check button.
3.7.6. Flood Exposure
This type allows the entire substrate to be exposed
without the mask. Once this exposure type is set in
the Parameters menu, the sequence can be started
by switching the contact lever. The substrate is
exposed according to the set exposure time
regardless of whether or not the mask holder was
loaded.
3.7.7. Test Exposure
This program allows to expose substrate sections
with different exposure times. The wedge error com
-
pensation head keeps clamped and the substrate
remains in exposure gap for the number of single ex
-
posure cycles.
• Up to 99 cycles are programmable.
• After each cycle a new exposure time must be
entered to perform the next test exposure step.
3.7.8. Multiple Exposure
For special applications or to determine exposure
times, the entire exposure time can be divided into
equal intervals. A wait time must in which no
exposure occurs must be set between these
intervals.
One exposure interval and one wait time are
referred to as an exposure cycle.
The following parameters must also be specified for
multiple exposure:
3.7.8.1. Exposure Cycles
Pressing this button allows you to enter the num-
ber of desired exposure cycles (min. 2) and then
confirm your entry with the ENTER button.
Now the following buttons appear in the Param-
eters menu:
3.7.8.2. Wait Time
Sets the wait time between individual cycles.
3.7.8.3. Exposure Time
Pressing this button opens a keyboard, which al-
lows you to enter the desired single exposure
time. Press ENTER to confirm your entry. The
display automatically switches back to the Pa
-
rameters menu and adds the value that you just
set.
Press the right/left arrow buttons to add the set pa-
rameters.
Load, align and expose the substrate as described
above.
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