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Model 880 DEPOSITION CONTROLLER
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SECTION 6.XX
e page 199 of 276 ^
Parameter 1 Density
access: DENS
Value Range 0.40 - 99.99
Units gm/cc
Reads Or Sets The Density Parameter depending which prefix letter A or B is used.
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Parameter 2 Z Factor
access: ZRATio
Value Range 0.100 - 9.999
Units None
Reads Or Sets The Z Factor Parameter depending which prefix letter A or B is used.
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(Obsolete)
Parameter 3 Tooling Xtal 1
access: OBSOLETE Was sensor 1 tool
Value Range 10.0 - 400.0
Units Percent
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(Obsolete)
Parameter 4 Tooling Xtal 2
access: OBSOLETE Was sensor 2 tool
Value Range 10.0 - 400.0
Units Percent
Reads or sets depending which prefix letter A or B is used, the tooling factor parameters.
These correspond to the two sensors available on the Model 880.
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(Obsolete)
Parameter 5 Start Xtal #
access: OBSOLETE Was initial channel
Value Range 0,1
Units 0 is Sensor 1, 1 is Sensor 2
This indicates which of the 2 sensor crystals will be used for a deposition run.
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Parameter 6 Setpoint Thk Lim
access: STHK Setpoint Thickness Limit
Value Range 0.000 - 999.999
Units Kilo Angstroms
The setpoint thickness parameter is used to provide a comparison point for the Model 880
thickness setpoint event. This event will be triggered whenever the thickness display
equals or exceeds the setpoint value.
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(non-sequencing mode only)
Parameter 7 Final Thickness Limit (Trigger)
access:
FTHK final thickness, end of run trigger
Value Range 0.000 - 999.999
Units Kilo Angstroms
Used to stop the deposition process in non-sequencing mode. Non-sequencing mode does
not use a process program but rather a film, which is invoked by making it the next active
film and pressing the START key sequence to begin the deposition process. It has,
therefore, one implicit process. The Final Thickness Limit Trigger stops the selected film
deposition when the thickness reaches this user entered thickness value. This value is
analgous to the thickness value in a process program when in sequencing mode.
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