Telemark 880 - Page 201

p Model 880 DEPOSITION CONTROLLER y
SECTION 6.XX
e page 200 of 276 ^
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Parameter 8 Setpoint Time Limit
access: SPTM
Value Range 0:00 - 99:59
Units Min:Sec
The setpoint time limit parameter is used to provide a comparison point for the Model
880 timer setpoint event status.
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Parameter 9 Soak 1 Power Value
access: PWR1 power condition power level 1
Value Range 0.0 - 100.0
Units Percent
This parameter sets the deposition source power value to be used as the first level of soak
power in the pre-deposition cycle. This power level will be maintained for the duration of
the soak 1 timer. This level is typically used to out gas and condition the source material.
A value of 0.0% causes the rise/soak 1 phase to be skipped.
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Parameter 10 Power Ramp 1 Time
access: RMP1 ramp time to power level 1
Value Range 0:00 - 99:59
Units Min:Sec
This parameter sets the duration of the power ramp from zero power to the power level
set by the soak 1 power value parameter.
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Parameter 11 Power Soak 1 Time
access: SKT1 soak time at power level 1
Value Range 0:00 - 99:59
Units Min:Sec
This parameter sets the time that the source will remain at the soak 1 power level
following the completion of the ramp to this level.
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Parameter 12 Soak 2 Power Value
access: PWR2 power condition power level 2
Value Range 0.0 - 100.0
Units Percent
This parameter sets the deposition source power value to be used as the second level of
soak power in the pre-deposition cycle. This power level will be maintained for the
duration of the soak 2 timer. A value of 0.0% skips the rise/soak 2 phases.
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Parameter 13 Power Ramp 2 Time
access: RMP2 ramp time to power level 2
Value Range 0:00 - 99:59
Units Min:Sec
This parameter sets the duration of the power ramp from the soak 1 power value or the
idle power value to the value set by the soak 2 power parameter.
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Parameter 14 Power Soak 2 Time
access: SKT2 soak time at power level 2