2
Functional Description
Mass Spectrometer
40 TSQ Quantum XLS Series User Guide Thermo Scientific
Vacuum System and Inlet Gasses Hardware
The vacuum system evacuates the region around the ion source, ion optics, mass analyzer, and
ion detection system. The principal components of the vacuum system include the following:
• Vacuum Manifold
• Turbomolecular Pump
• Forepump
• Convectron Gauges
• Ion Gauge
The inlet gasses hardware controls the flow of collision gas, CI reagent gas, calibration
compound, and air (during venting) into the mass spectrometer. The hardware for the inlet
gases includes the following components:
• Vent Valve
• Collision Gas Flow Control Valves
• Calibration Compound and CI Reagent Gas Flow Control
Figure 26 shows a functional block diagram of the vacuum system and inlet gasses hardware.
Figure 26. Functional block diagram of the vacuum system and inlet gases hardware
Collision
cell
Collision gas
divert valve
Collision
gas valve
Argon
gas port
Convectron
gauge
Exhaust
Forepump
Convectron
gauge
Ion
gauge
Transfer line
Gas
chromatograph
CI reagent
gas valve
CI reagent
gas port
Calibration
compound
valve
Calibration
compound
vial
Inlet
valve
Dual-inlet
turbomolecular pump
Analyzer
chamber
Ion source
chamber
Q0 quadrupole
chamber
Vent
valve
(3 x 10
- 6
Torr)
(4 x 10
- 5
Torr)
Nitrogen or
filtered air