<7. Trouble Shooting> 7-3
IM 80J01A01-01E
Probable Cause / Corrective Action
The laser calibrating function does
not operate properly.
Output power of lasers does not
stabilize.
After while, re-calibrate them.
In case of failure in re-calibration,
please contact the dealer
1
.
Confirm that CQ1 Main Unit is
turned on.
CQ1 Software freezes. / Change
between “CQ” and “HDD” modes can
not be done.
Is the sample loading port open?
Close it.
It might be that “OFFLINE” and
“Laser: LOCKED” are displayed in
status panel (refer to 5.7 Status
Panel)
Please do following procedure.
Close CQ1 Software.
Confirm that power switch and key
switch of Utility Box are ON.
Confirm ready lamp on Utility Box
is turned on. If it is blinking, wait
until stop blinking (about 1
minute).
Start CQ1 Software.
Measurement protocol can not be
read.
It might be that different Stage
Attachment is set.
Set Stage Attachment designated
in measurement protocol.
Chamber temperature doesn’t get to
setting temperature.
Setting temperature might be low.
Confirm setting temperature and
set proper temperature.
Is chamber temperature set over than
room temperature + 5?
Confirm room temperature and set
proper chamber temperature
CO
2
, O
2
concentrations of Gas Mixer
don’t get to setting concentration.
Remaining amount of each gas
cylinder might not be enough
Confirm remaining amount of
each gas cylinder.
Tubes might be buckled or collapsed.
Confirm tubes and if there are
abnormalities, please fix it.
Is outlet pressure of regulator proper?
Set it in the range of 0.1 – 0.15
MPa
Measurement data cannot be found
by HDD mode.
Confirm that the folder designated to
“Measurement List” is proper.
Designate the upper folder of
measurement data folder, whose
name is as <date_****>.
Sometimes temperature display isn’t
renewed.
Temperature display is renewed
at the time point that more than 5
minute elapse from previous
display renewal.
1
In the case of inquiring the dealer about trouble, it may need to send system log file.
For outputting of log file, please refer to page 5-7.
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