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FC-77 Series
Advanced Energy FC-77 Series User Manual
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User Man
ual
Ser
ies FC-77X / 77XX,
Ser
ies FC-78X / 78XX, and
Ser
ies FC-79X MFCs
5700512-C
2
4
Table of Contents
Default Chapter
7
Table of Contents
7
Chapter 1. Safety and Product Compliance Guidelines
15
Important Safety Information
15
Model Numbers for this Manual
15
Table 1-1. Standard MFC Model Numbers
15
Table 1-2. Block-Type MFC Model Numbers
17
Interpreting the Manual
18
Type Conventions
18
Table 1-3. High Temperature MFC Model Numbers
18
Danger, Warning, and Caution Boxes
19
Interpreting Product Labels
19
Safety Guidelines
20
Product Certification
21
Conditions of Use
21
Chapter 2. Product Overview
23
Product Description and Theory of Operation
23
Figure 2-1. MFC Cutaway View
23
MFC Components
24
Flow Sensor Assembly
25
Figure 2-2. MFC Functional Block Diagram
25
Bypass Assembly
26
Electronics Assembly
26
Valve Assembly
26
Chapter 3. Installation and Operation
27
Preparing to Install the Unit
27
Installation Requirements
27
Installing the Unit
28
Overview of Unit Installation
28
Confirming the MFC Model
29
Preparing the Installation Site
29
Unpacking the MFC
29
Positioning the MFC
29
Mounting the MFC
30
Making the Mechanical Connections
30
Making the Electrical Connection
31
Power Supply Requirements
31
Ground Connections
31
Testing the System for Leaks
32
Connecting the MFC to Peripheral Equipment
32
Figure 3-1. Connection to Peripheral Equipment Using a RO-Box Power Supply
32
Figure 3-2. Connection to Peripheral Equipment Using a Dedicated Power Supply
33
Operating the Unit
34
Figure 3-3. Example of Connections Using Dedicated Line Code LC-OUT-N
34
First-Time Operation
35
Zeroing the MFC
35
Figure 3-4. MFC Zero Point Adjustment
36
Maintenance
37
Storage
37
Chapter 4. I/O Connections and Communication
39
20-Pin Card Edge Connector and 20-Pin Honda Connector
39
Card Edge Connector
39
Figure 4-1. 20-Pin Card-Edge Connector
39
Honda Connector
40
20-Pin Connector Signal Descriptions
40
Figure 4-2. 20-Pin Honda Connector
40
Table 4-1. 20-Pin Connector Signal Descriptions
40
9-Pin Subminiature-D Connector
43
Connector
43
Pin and Signal Descriptions
43
Figure 4-3. 9-Pin Subminiature-D Connector
43
Special Function Signal Descriptions
45
Alarm Output (Error Detection) Signals
45
Table 4-2. 9-Pin Connector Signal Descriptions
45
Control Valve Purge Function Signals
46
Figure 4-4. Alarm Connection
46
Card Edge Purge Function Signals
47
Figure 4-5. Card Edge Purge Function Signals
47
Figure 4-6. Card Edge Normally Open Internal Circuitry for Purge Function
47
Figure 4-7. Card Edge Normally Closed Internal Circuitry for Purge Function
48
Figure 4-8. Honda 20-Pin Purge Function Connection
48
Honda 20-Pin Purge Function Signals
48
Figure 4-10. Honda 20-Pin Normally Closed Internal Circuitry for Purge Function
49
Figure 4-9. Honda 20-Pin Normally Open Internal Circuitry for Purge Function
49
Subminiature-D Purge Function Signal
49
Figure 4-11. 9-Pin Subminiature-D Purge Function Connection
50
Figure 4-12. 9-Pin Subminiature-D Internal Circuitry for Purge Function
50
Chapter 5. Troubleshooting and Global Customer Support
51
Troubleshooting
51
Alarm Signals
51
Troubleshooting the Gas Flow
51
No Gas Is Being Supplied
52
Figure 5-1. no Gas Is Being Supplied Troubleshooting Flow Chart
52
Set Point and Flow Output Do Not Match
53
Figure 5-2. Set Point and Flow Output Do Not Match Troubleshooting Flow Chart
53
Unstable Flow or Insufficient Output Exists
54
Figure 5-3. Unstable Flow or Insufficient Output Exists Troubleshooting Flow Chart
55
AE World Wide Web Site
56
AE Global Services
56
USA Support Locations
56
European Sales and Service Contacts
57
Table 5-1. AE Global Services Locations (USA)
57
Table 5-2. European Sales and Service Offices
57
Middle East Sales and Service Contacts
58
Table 5-3. European Sales Representative Contacts
58
Table 5-4. Middle East Sales and Service Contacts
58
Asian Sales and Service Contacts
59
Table 5-5. Pacific Rim Sales and Service Offices
59
Returning Mfcs for Repair
60
Packing an MFC for Shipping
60
Warranty
61
Authorized Returns
61
Warranty Statement
62
Chapter 6. Specifications and Reference Information
63
Model Specifications
63
Specifications for Model FC-770 Mfcs
64
Table 6-1. Specifications for FC-770 Series Mfcs
64
Specifications for Model FC-771 Mfcs
65
Table 6-2. Specifications for FC-771 Series Mfcs
65
Specifications for Model FC-772 Mfcs
66
Table 6-3. Specifications for FC-772 Series Mfcs
66
Specifications for Model FC-780HT Mfcs
67
Table 6-4. Specifications for FC-780HT Series Mfcs
67
Specifications for Model FC-780 Mfcs
68
Table 6-5. Specifications for FC-780 Series Mfcs
68
Specifications for Model FC-780X Mfcs
69
Table 6-6. Specifications for FC-780X Series Mfcs
69
Specifications for Model FC-781HT Mfcs
70
Table 6-7. Specifications for FC-781HT Series Mfcs
70
Specifications for Model FC-781 Mfcs
71
Table 6-8. Specifications for FC-781 Series Mfcs
71
Specifications for Model FC-782 Mfcs
72
Table 6-9. Specifications for FC-782 Series Mfcs
72
Specifications for Model FC-785 Mfcs
73
Table 6-10. Specifications for FC-785 Series Mfcs
73
Specifications for Model FC-785T-B Mfcs
74
Table 6-11. Specifications for FC-785T-B Series Mfcs
74
Specifications for Model FC-785X-B MFC
75
Table 6-12. Specifications for Model FC-785X-B MFC
75
Specifications for Model FC-785Y-B Mfcs
76
Table 6-13. Specifications for FC-785Y-B Series Mfcs
76
Specifications for Model FC-786 Mfcs
77
Table 6-14. Specifications for FC-786 Series Mfcs
77
Specifications for Model FC-786T-B Mfcs
78
Table 6-15. Specifications for FC-786T-B Series Mfcs
78
Specifications for Model FC-786Y-B Mfcs
79
Table 6-16. Specifications for FC-786Y-B Series Mfcs
79
Specifications for Model FC-790 Mfcs
80
Table 6-17. Specifications for FC-790 Series Mfcs
80
Specifications for Model FC-791 Mfcs
81
Table 6-18. Specifications for FC-791 Series Mfcs
81
Specifications for Model FC-795 Mfcs
82
Table 6-19. Specifications for FC-795 Series Mfcs
82
Specifications for Model FC-795T-B Mfcs
83
Table 6-20. Specifications for FC-795T-B Series Mfcs
83
Specifications for Model FC-796 Mfcs
84
Table 6-21. Specifications for FC-796 Series Mfcs
84
Specifications for Model FC-7700 Mfcs
85
Table 6-22. Specifications for FC-7700 Series Mfcs
85
Specifications for Model FC-7710 Mfcs
86
Table 6-23. Specifications for FC-7710 Series Mfcs
86
Specifications for Model FC-7720 Mfcs
87
Table 6-24. Specifications for FC-7720 Series Mfcs
87
Specifications for Model FC-7800 Mfcs
88
Table 6-25. Specifications for FC-7800 Series Mfcs
88
Specifications for Model FC-7810 Mfcs
89
Table 6-26. Specifications for FC-7810 Series Mfcs
89
Specifications for Model FC-7820 Mfcs
90
Table 6-27. Specifications for FC-7820 Series Mfcs
90
Specifications for Model FC-7850Y-B Mfcs
91
Table 6-28. Specifications for FC-7850Y-B Series Mfcs
91
Specifications for Model FC-7810 Mfcs
92
Table 6-29. Specifications for FC-7810 Series Mfcs
92
Specifications for Model FC-7820 Mfcs
93
Table 6-30. Specifications for FC-7820 Series Mfcs
93
Specifications for Model FC-7850Y-B Mfcs
94
Table 6-31. Specifications for FC-7850Y-B Series Mfcs
94
Specifications for Model FC-785Y-B Mfcs
95
MFC Dimensions
95
Table 6-32. Specifications for FC-785Y-B Series Mfcs
95
Dimensions for Standard MFC Models
96
Figure 6-1. Dimensions for Standard MFC Models with 1/4" VCR Fitting
96
Dimensions for Block-Type MFC Models
99
Figure 6-2. Dimensions of Block-Type MFC Models
99
Dimensions for High Temperature MFC Models
100
Figure 6-3. Dimensions for High Temperature MFC Models
100
Reference Information
101
Calibration References
101
Flow Indication
101
Product Label
102
Figure 6-4. MFC Label Example
102
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Advanced Energy FC-77 Series Specifications
General
Brand
Advanced Energy
Model
FC-77 Series
Category
Controller
Language
English
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