Edwards STP-iXA3306CV - Page 10

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page viii
PAGE
viii
TABLES
Table Title Page
1 Maximum gas flow-rate (STP-iXA3306C) 14
2 Maximum gas flow-rate (STP-iXA3306CV) 14
3 Maximum gas flow-rate (STP-iXA3306B) 15
4 Maximum gas flow-rate (STP-iXA3306BV) 15
5 Environmental requirements for installation 22
6 Eyebolt size 25
7 Pump functions 29
8 Control unit front panel functions 31
9 Control unit front panel functions (continued) 32
10 Tightening torque of bolt 36
11 Maximum torque predicted and recommended securing bolt
for inlet port flange 37
12 Power cable 41
13 TMS unit specification 49
14 Starting/stopping the STP pump
using contact input (X2 REMOTE) 60
15 Starting/stopping the STP pump
using voltage input (X2 REMOTE) (voltage input) 61
16 Reset Operation (X2 REMOTE) 62
17 LED Indications for each state 63
18 X2 REMOTE input signal pins 65
19 X2 REMOTE input signal pins (continued) 66
20 X2 REMOTE input signal pins (voltage input) 68
21 X2 REMOTE input signal pins (voltage input) (continued) 69
22 Input operation port setting 71
23 Rotation INHIBIT signal input 72
24 Second speed function 73
25 X2 REMOTE output signal pins 75
26 X2 REMOTE output signal pins (continued) 76
27 Rated contacts for relays CR1 to CR8 77
28 X3/X4 pin position 80
29 Communication parameters 83
30 Input operation port 84
31 Serial communication time out setting 85
32 Transmission control characters 90
33 Pump operation commands 98
34 Command list 103
35 Pump operation commands 105
36 Error message values 107
37 Error message values (continued) 108
38 Pump operation mode 110
39 Remote mode 115
40 Warning value bit assign 119
41 Parameter setting value 124
42 Option function number and parameter list 134
43 Option function number and parameter list 136
44 Functions of STP-Link 139
45 States of LEDs and X2 REMOTE output signals
at power failure 142
46 WARNING function 145