STP-iXA3306 Series Turbomolecular Pump
TABLES (CONTINUED)
Table Title Page
47 Default setting of WARNING function 149
48 Factory Setting and Variable Range 149
49 Priority of failure signal 151
50 Error List 152
51 Error List (continued) 153
52 Error List (continued) 154
53 Error List (continued) 155
54 Error List (continued) 156
55 Error List (continued) 157
56 Troubleshooting with no indication of the "FAILURE" LED 158
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