METALJET D2+ INSTALLATION
Revision 19, November 2016 Page 4-1
4 INSTALLATION
4.1 Initial Installation Checklist
This checklist is intended as a hands-on assistance before and during installation of the Excillum MetalJet D2+
source to minimize potential complications.
It is highly recommended that at least steps 1-6 are performed by the customer prior to on-site installation and
training by Excillum staff in order to save time. Should you feel uncertain about how to perform either of these
steps please contact Excillum support for advice.
1. Read the Operating Manual thoroughly, especially the sections regarding the installation requirements
that you as a customer are responsible for:
a. Mechanical mounting of the system
b. Ambient specifications (temperature and humidity)
c. Cooling water (unless your purchase includes this option)
d. Electrical requirements on mains supply
e. Electrical requirements of shutter driver (if you have purchased one)
f. Electrical requirements of the safety interlock system.
2. If you have purchased installation assistance and system training from Excillum, we urge you to send
us the details of your installation (as detailed above) well ahead of the installation visit so that we may
review it to make sure any issues are sorted out beforehand.
3. When you receive the MetalJet D2+ source, unpack it and make sure there are no transport damages
and that everything looks ok.
4. Without removing any of the liquid metal loop transport seals mechanically, install the pump box,
source head and the two electronics control racks in their intended positions and make sure that the
liquid loop appears to be able to mate once transport seals are removed (see Section 4.3.1).
5. If you have also purchased the optional water chiller and integrated controller, install these in their
intended positions.
6. Verify that the relative positions of different components are such that the provided cables can reach
between them with ease.
7. Produce and connect appropriate grounding cables according the instructions in Section 4.3.2.10 to
the protective earth (PE) terminals of the source head, pump box and two electronics rack modules.
8. Remove the transport seals and connect the liquid-metal loop properly (see Sections 4.3.2.2 and
Section 4.3.2.4).
9. Remove the transport seals and connect the vacuum hose to the roughing pump as well as the
electron gun (see Section 4.3.2.5).
10. Remove the transport seals and connect the water chiller to the pump box. Also connect the loose
ends of the cooling-water hoses. See Section 4.3.2.3.
11. Remove the transport seals and connect the high voltage cable to the electron gun as well as to the
high-voltage power supply (Section 3).
12. Plug in all interconnecting cables (Section 3).
13. Connect mains power to the pump box, and the two electronics rack modules.
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