METALJET D2+ OPERATION
Revision 19, November 2016 Page 5-1
5 OPERATION
This chapter opens with some introductory notes on the operation of the MetalJet D2+ source. The rest of the
chapter covers standard operation using the software that is delivered with the system: the core application X-
ray Control Software (XCS) consists of a controller software and a user interface, Human-Machine Interface
(HMI) or Graphical User Interface (GUI). All operations of the system can be carried out using HMI/GUI.
The instructions and screenshots assume that XCS 3.0.X is installed, including a custom desktop for the Debian
8 or higher Linux distribution that the x-ray system controller is running. However, most of the instructions are
valid also for older versions of the XCS .
5.1 Introductory notes on source operation
5.1.1 Starting jet pump
Whenever the jet pump in a MetalJet D2+ source has been turned off for some time, and the jet system has
been subjected to temperatures close to or below the freezing point of the alloy used, there is a risk of it
freezing. This may happen during storage or transport, or even in heavily air conditioned laboratories.
Before starting the jet pump in the MetalJet D2+ source it is therefore important to ensure that the alloy inside
the entire jet system has been liquefied.
MetalJet D2+ sources may be operated using two different anode alloys: ExAlloy-G1 and ExAlloy-I1.
They have different compositions, which are tailored for different applications. Contact Excillum for further
information about which alloy to choose for a specific application. The physical properties of the alloys are also
different.
Refer to the MetalJet D2+ service manual, Section Start jet pump, for instructions on how to prepare the
system for starting the jet pump.
5.1.2 Leave MetalJet D2+ system in On or Ready
It is strongly recommended that the MetalJet D2+ system is always in either the On state or in the Ready state
(see chapter 5.5.1) where vacuum is maintained and the metal-jet is running. In this state, the jet operation is
very stable and reliable for long times (year). Whenever the jet is stopped, a nozzle exchange can be required
to achieve stable operation (see Section 6.2.4).
5.1.3 Expected time between service
The main degradation factor for a MetalJet D2+ source is cathode aging caused by various processes such as
e.g. thermally induced evaporation of the LaB6 crystal surface.
All aging processes typically cause the minimum achievable spot size to increase over time and the maximum
achievable aspect ratio to decrease. This means that performance at a specific spot size and shape typically is
constant up until the time that this spot size and shape no longer can be maintained. The service interval is
therefore longer for larger spot sizes and smaller aspect ratios.
A typical service interval is 2000 h if the source is operated at 250 W with an 80 µm x 20 µm spot size using an
A200 cathode. This assumes that the vacuum level of the system is kept in low E-7 mbar range in the “On”
state, since elevated vacuum levels accelerate the aging process. Well-conditioned systems typically achieve
vacuum levels in the E-8 mbar range in the “Ready” state.
Please consult Excillum for advise on choice if cathode type.
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