Excillum MetalJet D2+ - 6 MAINTENANCE AND SERVICE; Summary of Systems and Components Requiring Maintenance

METALJET D2+ MAINTENANCE AND SERVICE
Revision 19, November 2016 Page 6-1
6 MAINTENANCE AND SERVICE
This chapter describes all system components that require maintenance and service. It explains what drive
service and give recommendations on when to perform service for individual components.
NOTE
Disclaimer of liability
Excillum accepts no liability for personal injury or material damage, losses or operating malfunctions due to
improperly performed maintenance.
Table 6-1 summarizes which systems and components that will require maintenance and service in order for
the MetalJet D2+ source to function normally. Each component is described in more detail in the Sections
indicated below. The Excillum recommendation minimize scheduled service, but assume that unexpected shut
downs, that does not damage the system further are acceptable. Other customers may wish to perform
preemptive maintenance based on third party Manufacturer information in order to minimize nonscheduled
down time.
Component
Section
Service when
1
Vacuum system
6.1
Roughing pump
6.1.1
Rough pump pressure is insufficient
Turbopump
6.1.2
Vacuum pressure is insufficient
Jet system
6.2
Jet pump lubricants
6.2.1
Inspect for leaks every 6 months
Replace lubricants with 2 year interval
Jet pump diaphragm
6.2.2
Diaphragm breaks
Jet pump check valves
6.2.3
Jet system troubleshooting efforts indicate check valve
malfunction.
Nozzle assembly
6.2.4
Nozzle fails to produce a stable jet.
Particle filter
6.2.5
When replacement of two successive nozzles assemblies fail to
produce a stable jet.
Exit window
6.2.6
Exit window fails or application requirements demand it.
Liquid metal spillage
6.2.7
When spillage occurs
Electron gun
6.3
Cathode assembly
6.3.1
Service interval driven by application spot size requirements.
Climate system
6.4
Fan filters
6.4.1
Inspect fan filters with a 6 month interval and if necessary clean or
exchange them for new ones.
Cooling water
6.4.2
No inspection necessary if water cooler is system integrated.
Periodic inspection if water cooler is not system integrated.
Table 6-1. Summary of systems and components that will require maintenance and service. Detailed
information can be found, and when to perform service.
1
This is the summary recommendation by Excillum, but the complete referenced section should be read prior
to deciding on service intervals.