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Excillum MetalJet D2+ - 5.1.4 Electron Beam Power vs. Spot Size

Excillum MetalJet D2+
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METALJET D2+ OPERATION
Revision 19, November 2016 Page 5-2
5.1.4 Electron beam power vs. spot size
The MetalJet D2+ source is in principle capable of focusing 300 W of power into a sub ~5 µm spot. Such a high
anode power loading will however generate significant amounts of metal vapor that can damage the source in
various ways. The maximum power for a given spot size and shape is therefore limited by software. It is
important that the spot size is accurately calibrated. The spot size is regularly calibrated (see 5.9.1) in order to
avoid too high power loading. It is important to not override this calibration.
NOTE
It is important to not override the calibrated spot size
To avoid too high power loading of the anode.

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