EasyManua.ls Logo

Excillum MetalJet D2+ - 5.9.1 Recalibrate Spot Size; 5.10 Normal Operation; 5.10.1 Turning On X-ray Generation; 5.10.2 Change Emission Power and Spot Size

Excillum MetalJet D2+
103 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
METALJET D2+ OPERATION
Revision 19, November 2016 Page 5-14
The emission power will now be increased to the maximum power allowed for calibration
using the current spot size settings, or to the requested power if it is lower than the
maximum allowed power.
The system will then use an iterative algorithm to find the correct focus- and linefocus-coil
settings.
3. After the recalibration routine has finished the machine will go to the “On” state.
4. The actual spot size is now measured and displayed in the “Spot info” region of the “Summary” tab. If
the deviation between requested spot size and actual spot size is too great, the system will warn you
and you will not be allowed to enter the “On” state. This usually indicates a hardware error.
5.9.1 Recalibrate spot size
Due to the dynamic properties of the cathode, the system must be recalibrated regularly. This is done
automatically when entering the “On” state and periodically every 24 hours, but it can also be done explicitly
by clicking the “Recalibrate” button. The system will return to the “On” state after recalibration.
5.9.2 Validate spot size
The actual electron beam spot size can be verified at any given time by clicking the validate button. The
validation routine only measures the spot size without making changes to the focus lens and linefocus coils.
5.10 Normal operation
This mode of operation requires that a full parametrization (see Section 5.8) at the correct high voltage setting
has been performed and that the system is in the “Ready” state. There may be some transient emission
instabilities when ramping up power. This is due to changes in the surface chemistry as oxides are evaporated
from the cathode. This effect may be amplified when the system has been run at low power for a long time
during the parametrization routine.
5.10.1 Turning on x-ray generation
1. Go to the “Summary” tab and follow the instructions in Section 5.9 to change the emission power and
spot size.
2. Click the On button and wait for the green button to indicate that the system has reached the “On”
state and the emission current is stable.
5.10.2 Change emission power and spot size
1. Go to the “Summary” tab and follow the instructions in Section 5.9 to change the emission power and
spot size.
2. Click the Recalibrate button and wait for the green button to indicate that the system has reached the
“On” state and the emission current is stable.
5.10.3 Turning off x-ray generation
It is strongly recommended to put the MetalJet D2+ source in standby when not using the system. The standby
state is called “Ready” and means that the vacuum pumps and the metal-jet pump are running, but the high
voltage is not activated.
1. Go to the “Summary” tab and click the Ready button.
This will turn off the x-ray generation and high voltage and put the system in a standby state.
5.10.4 Turning off the MetalJet D2+ source
If the source is not going to be used for a long time (more than two months), it may be completely turned off.
1. Go to the “States” tab and click the Stop button.

Table of Contents