METALJET D2+ TABLE OF CONTENTS
Revision 19, November 2016 vi
5.6 User levels .......................................................................................................................................... 5-8
5.7 Error messages ................................................................................................................................... 5-8
5.8 Parametrization .................................................................................................................................. 5-9
5.8.1 Prepare system for parametrization .............................................................................................. 5-9
5.8.2 Align electron beam to optical axis .............................................................................................. 5-10
5.8.3 Determine jet size and position ................................................................................................... 5-10
5.8.4 Characterize focus lens and verify jet stability ............................................................................. 5-11
5.8.5 Characterize linefocus coils .......................................................................................................... 5-12
5.9 Set emission power and spot size ..................................................................................................... 5-13
5.9.1 Recalibrate spot size .................................................................................................................... 5-14
5.9.2 Validate spot size ......................................................................................................................... 5-14
5.10 Normal operation ............................................................................................................................. 5-14
5.10.1 Turning on x-ray generation .................................................................................................... 5-14
5.10.2 Change emission power and spot size ..................................................................................... 5-14
5.10.3 Turning off x-ray generation .................................................................................................... 5-14
5.10.4 Turning off the MetalJet D2+ source ....................................................................................... 5-14
5.11 System Settings ................................................................................................................................. 5-16
5.12 Software API ..................................................................................................................................... 5-17
6 MAINTENANCE AND SERVICE ........................................................................................................ 6-1
6.1 Vacuum system................................................................................................................................... 6-2
6.1.1 Roughing pump .............................................................................................................................. 6-2
6.1.2 Turbopump ..................................................................................................................................... 6-2
6.2 Jet system ........................................................................................................................................... 6-2
6.2.1 Jet pump lubricants ........................................................................................................................ 6-2
6.2.2 Jet pump diaphragm ...................................................................................................................... 6-3
6.2.3 Jet pump check valves .................................................................................................................... 6-3
6.2.4 Nozzle assembly ............................................................................................................................. 6-4
6.2.5 Particle filter ................................................................................................................................... 6-6
6.2.6 Exit window .................................................................................................................................... 6-6
6.2.7 Liquid metal spillage ....................................................................................................................... 6-7
6.3 Electron gun ........................................................................................................................................ 6-7
6.3.1 Cathode assembly .......................................................................................................................... 6-7
6.4 Climate system ................................................................................................................................... 6-9
6.4.1 Fan filters ........................................................................................................................................ 6-9
6.4.2 Cooling water ................................................................................................................................. 6-9
7 SHUTDOWN .................................................................................................................................. 7-1
To Next Page
Loading...