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8.2.5 Checking the flow rates (optional visual inspection)
In some systems, there are also variable area flow meters installed in the gas streams.
These are not absolutely essential since the flow rate is generally controlled via the
pressure, but provide an option for additional checks.
Step
StepStep
Step
Action: Reading the gauges
Action: Reading the gaugesAction: Reading the gauges
Action: Reading the gauges
1.
The flow rates are correct, the ranges are as described in section 2 of the User
Manual.
2.
The flow rates are incorrect, a process gas pressure alarm is active, the inlet
pressures are already at maximum.
3.
If the case described in step 2 applies, the gas and voltage supply must be
disconnected. Filters or flame barriers must be replaced. Do not complete any
further measurements unless step 2 is correct.
4.
Attempt the repair work described in sections 5 and 6 of this manual. If
necessary, notify your TAC.
8.2.6 Checking / Replacing the inlet filters and adapters
The inlet filters should be inspected at regular intervals to prevent errors caused by
blockages. If they must be replaced despite the upstream external filter system,
proceed as follows:
Steps to replace an inlet filter
Steps to replace an inlet filterSteps to replace an inlet filter
Steps to replace an inlet filter
!Obey the explosion protection regulations!
!Obey the explosion protection regulations!!Obey the explosion protection regulations!
!Obey the explosion protection regulations!
1
Close the main valve on the gas supply line and relieve the pressure in the supply line
to the device.
2.
When the residual gas has flowed through the device, switch off the electrical supply to
the device.
3.
Only carry out the following work when the device is depressurized and the ambient
conditions are similar to the interior.
Disconnect the gas pipe from the device.
Ensure that no gas escapes.
4.
Disconnect the Swagelok pipe fittings from the filter and
replace it with a new filter
5. Refit the fittings and pipelines to the device.
6 Open the gas supply to the supply line.
7
It is essential that you conduct a tightness test. Ensure that no gas escapes.
8 If everything is tight, switch on the device or restart operations.
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