Table 2-1. Sensor Response to Interferants (continued)
INTERFERANT
CONCEN-
TRATION
(PPM)
Br
2
F
2
SiH
4
PH
3
AsH
4
GeH
3
B
2
H
6
HCL
Ammonia
25 0 0
No Data No Data No Data No Data No Data
0
Arsine
1
No Data No Data
10.71151
Bromine
223
No Data No Data No Data No Data No Data
0
Butane
10000000000
Carbon Dioxide
2000 0 0 0 0 0 0 0 0
Carbon Monoxide
10000000000
Chlorine
22.54
No Data No Data No Data No Data No Data
0
Diborane
20
No Data No Data
43.55 5 20 0
Fluorine
51.55
No Data No Data No Data No Data No Data
0
Germane
1
No Data No Data
10.71151
Hydrogen
400
No Data No Data
0.2 0.1 0.2 0.2 0.1 0
Hydrogen Chloride
40 0 0
No Data No Data No Data No Data No Data
40
Hydrogen Cyanide
10 0 0
No Data No Data No Data No Data No Data
0
Hydrogen Sulfide
10 0 0 20 3 7 7 50 40
Methane
2.5% 0 0 0 0 0 0 0 0
Nitrogen Dioxide
500
No Data No Data No Data No Data No Data
0
Nitrogen Oxide
50 0 0
No Data No Data No Data No Data No Data
20
Phosgene
10 0.5 1.5 0 0 0 0 0 0
Phosphine
0.5
No Data No Data
0.70.51132
R134A
1000000000
Silane
5
No Data No Data
5 0.1 0.2 0.2 15 7
Sulfur Dioxide
10 0 0 15 2.5 5 5 40 0
Chapter 2, Start-up
2-7