MAINTENANCE
Maintenance MJB4 Rev06 10-09 47
5
5. MAINTENANCE
5.1. Parameter Ranges and
Default Settings
This table lists the value ranges of parameters used
in the main processes.
Parameter Description Default value Range of values
Expose Type Type of exposure Soft [Soft, Hard, Low Vac, Vac,
Flood-E, Lamp test]
Exp. Time Exposure time 5.0 sec. [0.1…999.9]
Wait Time Pause between exposure
intervals (multiple exposure)
5 sec. [2.0…999.9]
Exp. Cycles Number of cycles (multiple
exposure)
1 [1…99]
HC-Wait Time Time for N2 purge below
wafer before exposure
5 sec. [0.1…999.9]
Pre Vac Length of pre-vacuum 5 sec. [0.1…999.9]
Full Vac Length of main vacuum 5 sec. [0.1…999.9]
Vac Purge N
2
purge time of mini
chamber following vacuum
exposure
5 sec. [01…999.9]
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