MAINTENANCE
48 Maintenance MJB4 Rev06 10-09
5
5.1.1. Overview
5.1.1.1. Valves (V)
Identifier Medium Function
5/V1 V Chuck clamping on WEC - head
5/V2 P WEC – brake close
5/V3 V WEC – brake opener
6/V1 V Mask vacuum (valve open for constant vacuum)
8/V1 V Vacuum under substrate
8/V2 N2 Vacuum reduction under substrate
8/V3 N2 Nitrogen flow under substrate (hard contact)
8/V4 N2 Nitrogen flow under substrate (release after exposure)
8/V5 R Ventilation under substrate, pressure controller
8/V6 R Ventilation, hard contact and after exposure
8/V7 V Main vacuum, vacuum chamber
8/V8 V Pre-vacuum, vacuum chamber
8/V9 N2 Reduced vacuum chamber
8/V10 N2 Vacuum chamber reduction / nitrogen pressure
8/V11 R Ventilation, vacuum chamber
11/V1 P Shutter, closer
11/V2 P Shutter, opener
11/V3 P Lamp house, focus cooling
11/V4 N2 Lamp cooling (shutter and upper and lower lamp socket)
12/V1 P Microscope lift up/down
12/V2 P TSA manipulator brake, X- and Y-direction
15/V1 P Mirror house forward/ back
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