MAINTENANCE
Maintenance MJB4 Rev06 10-09 49
5
5.1.1.2. Throttles (T; T0)
5.1.1.3. Pneumatic Controllers (PG)
Identifier Function
5/T04 Exhaust throttle WEC pressure
6/T02 Purge mask holder for negative resist
8/T02 Vacuum reduction under substrate
8/T03 Nitrogen under substrate (hard contact)
8/T04 Nitrogen under substrate (release of substrate) / volume controlled
8/T05 ventilation under substrate/ pressure controlled
8/T08 Pre-vacuum, vacuum chamber
8/T09 Reduced vacuum chamber
8/T010 Chamber nitrogen purge / volume controlled
11/T01.1 Speed shutter opener - open
11/T01.2 Speed shutter opener - close
11/T02.1 Speed shutter closer - open
11/T02.2 Speed shutter closer - close
11/T3 Cooling lamp house - heat sink
11/T4.1 Cooling shutter
11/T4.2 Cooling lower lamp socket
11/T4.4 Cooling upper lamp socket (only with 500W HgXe lamp)
12/T01.1 Controls speed of microscope motion up
12/T01.2 Microscope motion, down
15/T01.1 Speed of mirror house motion backward
15/T01.2 Speed of mirror house motion forward
Identifier Medium Function
0PG1 - B5 P Machine main air pressure
0PG2 - B6 N
2
Machine main nitrogen pressure
0PG3 - B7 N
2
Vacuum
1/FM1 - B10 V Flowmeter
5/PG1 - B8 P WEC pressure
8/PG7 - B9 V Vacuum chamber
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