SUSS MJB4 - Page 60

MAINTENANCE
50 Maintenance MJB4 Rev06 10-09
5
5.1.1.4. Pressure Regulators (PR)
5.1.1.5. Sensors (B, S)
Identifier Function
0PR1 Machine main air pressure
0PR2 Machine main nitrogen pressure
5PR1 WEC pressure
Identifier Function
S1 Z axis Contact position
S3 Z axis align position
S2 Z axis Z-grab position
B4 Microscope up / down
B2 Mirror house front
B3 Mirror house back
B1 WEC head brake
S4 Main switch - ON
B10 Lamp cooling
B5 Air pressure limit
B6 Nitrogen limit
B7 Vacuum limit