Telemark ST Series - Interfaces; Interlocks (Required); Remote I;O (Optional)

ST Series Power Supply Instruction Manual SPECIFICATIONS
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2.7 INTERFACES
The ST Power Supply interfaces to the Process Chamber controls via two D-
Subminiature interface connections. One is required for interlock status and safety, and
one is optional for Remote Process Control.
2.7.1 Interlocks (Required)
15pin D-Sub connector (J6) on the rear of the ST Controller.
4pin Amphenol EPO cable connection or provided jumper on the rear of the ST Power
Supply (J5).
(See Chapter 3.5 for pinout information)
2.7.2 Remote I/O (Optional)
37 pin D-Sub connector (J4) on the rear of the ST Controller.
(See Chapter 5.1 for pinout information)