ST Series Power Supply Instruction Manual TROUBLESHOOTING
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Possible causes for this fault include:
Emitter assembly malfunction inside the vacuum chamber resulting in a heavy
arc condition or emitter short.
Process material may have found its way between the Emitter assembly and the
crucible source, or in between the High Voltage feedthrough and grounded
cover.
Component failure inside the HVPS resulting in loss of calibration.
7.1.3 HV Out of Regulation
This is a non-latching “Soft Fault” and will serve to alert the operator to an unsatisfactory
condition, yet it will try to maintain operation of HV.
This condition will occur when the HVPS detects that the HV output voltage has exited
the specified operating range as set by the ST Controller and it cannot regulate the
output voltage back into that set range. The Power Supply will enter a “Rollback” where
it will momentarily cut power to the output for 200uS and then try to re-establish a beam
at the specified set output. This will continue repeatedly until the HVPS either re-
establishes the beam or determines that to many attempts have passed in a set amount
of time and enters an Arc Counter Fault.
Possible causes for this fault include:
Process arcing inside the chamber
Intermittent shorting between HV leads and grounded chamber components due
to operation at higher pressures.
Intermittent shorting of HV in crushed or cut cables (e.g. between conductor and
shielding) or other points where HV can arc to Ground.
Failure of internal components required to produce HV.
NOTE: The “REG” LED on the ST Controller is also tied to this fault and
responds to the same conditions but for another reason. The “REG” LED
is active when the HVPS detects that the HV output emission current has
exited the specified operating range as set by the ST Controller and it
cannot regulate the output emission current back into that set range.
7.1.4 Arc Counter Fault
This is a “Latched Fault” and will shut down HV operation.
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